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Clean Room

Autosamdri®-915B, Series B

The Supercritical Automegasamdri®-915B, Series B. Smooth operation and precise control are the Supercritical Automegasamdri®-915B's trademark; wafer holders and inserts are provided that allow anti-stiction processing up to 5 pieces of either 6", 4", 3", 2" waters or 10mm square die per process run.
  • Cabinet: 14.25" (36.2cm) Width x 11.75" (29.8cm) Height x 25" (63.5cm) Length
  • System Set-Up Area Required: 42" (107cm) Width x 30" (76cm) Depth.
  • Chamber size: 6.50" I.D. x 1.25" Depth. Chamber Volume: 679 ml
  • Temperature gauge range: -30°C to 60°C, Pressure gauge range: 0 to 2,000psi
  • 120V/50-60Hz (Other voltage units also available. Please Inquire)
  • LCO2 flow is controlled through Micro Metering Valves with Vernier handles for easily controlled flow rates.*