Autosamdri®-915B, Series B
The Supercritical Automegasamdri®-915B, Series B. Smooth operation and precise control are the Supercritical Automegasamdri®-915B's trademark; wafer holders and inserts are provided that allow anti-stiction processing up to 5 pieces of either 6", 4", 3", 2" waters or 10mm square die per process run.
- Cabinet: 14.25" (36.2cm) Width x 11.75" (29.8cm) Height x 25" (63.5cm) Length
- System Set-Up Area Required: 42" (107cm) Width x 30" (76cm) Depth.
- Chamber size: 6.50" I.D. x 1.25" Depth. Chamber Volume: 679 ml
- Temperature gauge range: -30°C to 60°C, Pressure gauge range: 0 to 2,000psi
- 120V/50-60Hz (Other voltage units also available. Please Inquire)
- LCO2 flow is controlled through Micro Metering Valves with Vernier handles for easily controlled flow rates.*